杨卓青

杨卓青 / 研究员、博导


电子邮箱：yzhuoqing@sjtu.edu.cn
办公电话：021-34206687
办公地点：微纳综合实验楼2-306室
研究方向：微机电系统（MEMS）、金属基MEMS技术、柔性纤维传感器与电子皮肤

 

2018.12~至今，上海交通大学，电子信息与电气工程学院，研究员

2013.12~2018.11，上海交通大学，电子信息与电气工程学院，副研究员

2011.11~2013.11，日本国立产业技术综合研究所（AIST），JSPS博士后特别研究员（JSPS Postdoctoral Fellow）

2010.06~2013.11，上海交通大学，微纳科学技术研究院，助理研究员

2006.04~2010.03，上海交通大学，微纳科学技术研究院，博士

2003.07~2005.09，哈尔滨工程大学，机电工程学院，硕士

1999.09 ~2003.07，哈尔滨工程大学，机电工程学院，本科

        1982年04月生，上海交通大学“微米纳米加工技术全国重点实验室”骨干成员，于2003年和2005年在哈尔滨工程大学机电工程学院获得学士与硕士学位，2010年获得上海交通大学微电子学与固体电子学博士学位。目前研究工作主要包括MEMS惯性开关器件、PowerMEMS、封装以及超细柔性纤维/圆管/毛细管等表面的3D MEMS集成制造技术等。先后主持承担国家自然科学青年基金、面上项目，国家重点研发计划课题，国家“863”项目子课题，上海市“浦江人才计划”（A类）等项目。

        2011-2013年期间，受日本学术振兴会（JSPS）资助赴日本国立产业技术综合研究所（AIST）从事博士后（JSPS Postdoctoral Fellow）工作，研究期间成功开发了可用于超细基底的3D曲面光刻技术，并实现了在微细（~百微米直径）石英圆管、毛细管、以及柔性纤维表面制作高精度、高分辨率的多层多功能微型传感器技术和柔性超细单光纤医用内窥镜探头；同时，结合该研究中心在纳米压印技术上的国际领先优势，完成了能够充分提高信号灵敏度的集成纳米压印的微型MEMS柔性血糖传感器开发，为柔性电子纤维编织提供了重要的技术支撑，获得日本发明专利1项。

        近年来，在微机电系统技术（MEMS）领域著名期刊和国际会议IEEE-JMEMS, Adv Mater, Nano Energy, Adv Energy Mater, JMM，Lab Chip, IEEE Trans. Electron Devices, Sensors and Actuators, IEEE MEMS, IEEE NEMS, TRANSDUCERS, IEEE SENSORS, μTAS等发表学术论文120多篇，获得授权中国发明专利20余项。多次担任IEEE INEC、IEEE NANO、IEEE NEMS、APCOT、CSMNT等多个国际会议分会场主席及TPC成员，担任Micro and Nanosystems、Nonmanufacturing 、《功能材料与器件学报》、《半导体光电》等期刊编委。

        目前为IEEE高级会员（IEEE Senior Member）、中国仪器仪表学会微纳器件及系统技术分会常务委员、中国微米纳米技术学会微纳机器人分会理事、中科院深圳先进技术研究院客座研究员、中国微米纳米技术学会（CSMNT）高级会员，2014年入选上海市“浦江人才计划”（A类），2016年获得上海市“技术发明一等奖”。

招收学生的范围：

材料、机械、物理、化学、半导体、电子信息和生物医学等专业。

 

研究方向

  1. 微机电系统（MEMS）：金属基MEMS传感器与执行器
  2. MEMS惯性开关器件、物联网近零功耗振动传感器及其相关应用
  3. 超细基底三维（3D）曲面光刻技术
  4. 微纳柔性传感技术（超细柔性基传感器、柔性电子器件等）

 

代表性论著

专著章节:

  1. Zhuoqing Yang. 《Advanced MEMS/NEMS Fabrication and Sensors》 (Hardcover Book), Springer Nature Press, 2021, Print ISBN: 978-3-030-79748-5.
  2. Zhuoqing Yang, and Yi Zhang, Lab-on-a-tube Surface Micromachining Technology, Chapter 5 of Thin Film Processes – Artifacts on Surface Phenomena and Technological Facets, Ed. Jagannathan Thirumalai, InTech Press, pp. 91-105, Print ISBN 978-953-51-3067-3. (Chapter)
  3. Zhuoqing Yang, Guifu Ding, Yan Wang and Xiaolin Zhao, A MEMS Inertial Switch Based on Non-silicon Surface Micromachining Technology, Chapter of Micro Electro Mechanical Systems, Ed. Qing-An Huang, Springer Nature Singapore Pte Ltd. Press, pp. 1-55, ISBN: 978-981-10-5946-9. (Chapter)

代表论文: 

  1. M. Li, Z. Hu, B. Yan, J. Wang, H. Zhang, F. Ye, B. Sun, J. Liu, Y. Li, G. Ding, F. Zang, Z. Yang*, A flexible resistive strain gauge with reduced temperature effect via thermal expansion anisotropic composite substrate. Microsyst Nanoeng 10, 129 (2024).
  2. H. Zhang, B. Fu, K. Su, and Z. Yang*, “Long-Term Sleep Respiratory Monitoring by Dual-Channel Flexible Wearable System and Deep Learning-Aided Analysis,” IEEE Transactions on Instrumentation and Measurement, 2023, 72: 1-9.
  3. Penglei Zhang, Yahui Li, Chao Ren, Haodong Zhang, Xian Shi, Yu Liu, Mengqiu Li, Yongcun Hao, Honglong Chang, Zhuoqing Yang*, “A MEMS Inertial Switch With Large Scale Bi-Directional Adjustable Threshold Function”, IEEE Journal of Microelectromechanical Systems, vol. 31, no. 1, pp. 124-133, February, 2022.
  4. H. Zhang, P. Zhang, Y. Li, R. Zheng, G. Ding, Q. Xiao, K. Su, S. Yin, Z. Yang*, “A Wearable Ultrathin Flexible Sensor Inserted Into Nasal Cavity for Precise Sleep Respiratory Monitoring,” IEEE Transactions on Electron Devices, 2021, 68(8): 4090-4097.
  5. H. Zhang, Y. Li, P. Zhang, C. Ren, X. Xu, B. Sun, Z. Yang*, “A Flexible Implantable Polyimide Catheter Device for Targeted Treatment of Cardiovascular Diseases by Aggregating Magnetic Nanoparticles,” IEEE Transactions on Components, Packaging and Manufacturing Technology, 2021, 11(6): 911-917.
  6. Qi Zhang, Yahui Li, Han Cai, Mingfang Yao, Haodong Zhang, Linqi Guo, Zhenjie Lv, Mengqiu Li, Xichi Lu, Chao Ren, Penglei Zhang, Yanxin Zhang, Xian Shi, Guifu Ding, Jinyuan Yao, Zhuoqing Yang*, Zhong Lin Wang. “A Single-Droplet Electricity Generator Achieves an Ultrahigh Output over 100 V without Pre-Charging”, Advanced Materials, vol. 33, no.51, 2021.
  7. Yahui Li, Guizhong Li, Penglei Zhang, Haodong Zhang, Chao Ren, Xian Shi, Han Cai, Yanxin Zhang, Yusen Wang, Zhanfeng Guo, Hongfang Li, Guifu Ding, Haogang Cai, Zhuoqing Yang*, Chi Zhang, Zhong Lin Wang, “Contribution of Ferromagnetic Medium to the Output of Triboelectric Nanogenerators Derived from Maxwell’s Equations”, Advanced Energy Materials, vol. 11, no.21, 2021.
  8. Yahui Li, Wei Zheng, Haodong Zhang, Haoqiang Wang, Han Cai, Yanxin Zhang, Zhuoqing Yang*, “Electron transfer mechanism of graphene/Cu heterostructure for improving the stability of triboelectric nanogenerators”, Nano Energy, vol. 70, 104540, 2020.
  9. Xiaojing Zhang, Xiaojian Xiang, Yiping Wang, Guifu Ding, Xiaoxue Xu, Zhuoqing Yang*, “A heterogeneous integrated MEMS inertial switch with compliant cantilevers fixed electrode and electrostatic locking to realize stable on-state”, IEEE Journal of Microelectromechanical Systems, vol. 28, no. 6, pp. 977-986, December, 2019.
  10. Zhuoqing Yang*, Jianhao Shi, Jinyuan Yao, Xiaojing Zhang, Guifu Ding and Xiaolin Zhao. “A Laterally Driven MEMS Inertial Switch With Double-Layer Suspended Springs for Improving Single-Axis Sensitivity”, IEEE Trans. Compon., Packag., Manuf. Technol., vol. 8, no. 10, pp. 1845-1854, 2018.
  11. Zhuoqing Yang*, Jianhao Shi, Bin Sun, Jinyuan Yao, Guifu Ding, Renshi Sawada, “Fabrication of electromagnetically-driven tilted microcoil on polyimide capillary surface for potential single-fiber endoscope scanner application,” Micromachines, vol. 9, DOI: 10.3390/mi9020061, 2018.
  12. Qiu Xu, Bin Sun, Yigui Li, Xiaojian Xiang, Liyan Lai, Jian Li, Guifu Ding, Xiaolin Zhao, Zhuoqing Yang*, “Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration,” Sensors and Actuators A: Physical, vol. 270, pp.34-45, 2018.
  13. Qiu Xu, Zhuoqing Yang*, Yunnan Sun, Liyan Lai, Zhiyu Jin, Guifu Ding, Xiaolin Zhao, Jing Wang. “Shock-resistibility of MEMS-based inertial microswitch under reverse directional ultra-high g acceleration for IoT applications”, Scientific Reports, vol.7, 45512, 2017.
  14. Qiu Xu, Zhuoqing Yang*, Bo Fu, Jianhua Li, Hao Wu, Qihuan Zhang, Yunna Sun, Guifu Ding, Xiaolin Zhao. “A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time”, Applied Surface Sciences, vol. 387, pp. 569-580, 2016.
  15. Qihuan Zhang, Zhuoqing Yang*, Qiu Xu, Yang Wang, Guifu Ding, Xiaolin Zhao. “Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity”, Journal of Micromechanics and Microengineering, vol. 26, 055008(15pp), 2016.
  16. Qiu Xu, Zhuoqing Yang*, Qihuan Zhang, Yunnan Sun, Yang Wang, Hong Wang, Guifu Ding, Xiaolin Zhao. “Simulation and characterization of a thin film Au/Ni micro hot bridge-wire ignition element under capacitor discharging”, International Journal of Thermal Sciences, vol. 102, pp. 100-110, 2016.
  17. Wenguo Chen, Zhuoqing Yang*, Yan Wang, Guifu Ding, Hong Wang, Xiaolin Zhao. “Fabrication and characterization of a low-g inertial microswitch with flexible contact point and limit-block constraints”, IEEE/ASME Transactions on Mechatronics, vol. 21, pp. 963-972, 2016.
  18. Yang Wang, Zhuoqing Yang*, Qiu Xu, Wenguo Chen, Guifu Ding, Xiaolin Zhao. “Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time”, Journal of Micromechanics and Microengineering, vol. 25, 085012(8pp), 2015.
  19. Zhuoqing Yang*, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “A novel MEMS compatible lab-on-a-tube technology”, Lab on a Chip, vol. 14, pp. 4604-4608, 2014.
  20. Zhuoqing Yang*, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “Flexible implantable microtemperature sensor fabricated on polymer capillary by programmable UV lithography with multilayer alignment for biomedical applications”, IEEE/ASME Journal of Microelectromechanical Systems, vol. 23, No. 1, pp. 21-29, July, 2014.
  21. Zhuoqing Yang*, Bin Zhu, Wenguo Chen, etc. “Fabrication and characterization of a multidirectional-sensitive contact-enhanced inertial microswitch with an electrophoretic flexible composite fixed electrode”, Journal of Micromechanics and Microengineering, vol. 22, 045006(10pp), 2012.
  22. Zhuoqing Yang*, Guifu Ding, Haogang Cai, etc. “A MEMS inertia switch with bridge-type elastic fixed electrode for long duration contact”, IEEE Transactions on Electron Devices, vol. 55, pp. 2492-2497, 2008.
  23. Haogang Cai, Zhuoqing Yang*, etc. “Development of a novel MEMS inertial switch with compliant stationary electrode”, IEEE Sensors Journal, vol. 9, pp. 801-808, 2009.
  24. Jianhao Shi, Hongfang Li, Bin Sun, Xiaolin Zhao, Guifu Ding and Zhuoqing Yang. “A Flexible Pressure Sensor Based on Low-Cost Electroplated-Ni Film Induced Cracking for Wearable Devices Application,” IEEE NEMS 2018, Apr. 22-26, Singapore. (Oral)
  25. Zhuoqing Yang, Jianhao Shi, Bin Sun, Congchun Zhang, Guifu Ding, and Xiaolin Zhao. “Non-Silicon Micro/Nano 3D Integrated Manufacturing Technology for Near-Zero-Power and Flexible MEMS Devices Applications,” 8th IEEE International Nanoelectronics Conference (IEEE INEC), Jan 03-05, 2018, Kuala Lumpur, Malaysia. (Invited Talk)
  26. Mengyuan Zhao, Zhuoqing Yang, Bin Sun, Bo Dai, Hua Liu, Jinyuan Yao, Xiaoxue Xu, Guifu Ding, Xiaolin Zhao. “A micro electromagnetically-driven scanner by 2-DOF second-order resonance to extend scanning scale for ultra-thin single-fiber endoscope application,” IEEE MEMS 2018, pp. 575-578, Belfast, UK.
  27. Zhuoqing Yang. “MEMS sensors and actuators based on 3D micro-fabrication technologies for wearable devices and IoT applications,” The 4th Int’l Conference on Semiconductor Physics and Devices (ICSPD 2017), Sep. 24-26, Suzhou, China (Keynote Speech)
  28. Qiu Xu, Zhuoqing Yang, Yunna Sun, Mengyuan Zhao, Jian Li, Guifu Ding, Xiaolin Zhao. “Shock-resistibility of inertial microswitch under reverse sensitive directional ultra-high G acceleration”, IEEE MEMS 2017, pp. 789-792, Las Vegas, NV, USA.
  29. Qiu Xu, Zhuoqing Yang, Yunnan Sun, Jiangbo Luo, Hongfang Li, Guifu Ding, Xiaolin Zhao, Jinyuan Yao, Jing Wang, “A novel inertial microswitch with synchronous follow-up compliant electrodes for extending output switch-on pulse width,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017). Kaohsiung, Taiwan, Jun. 18-22, pp. 2015-2018.
  30. Qihuan Zhang, Zhuoqing Yang, Qiu Xu, Mengyuan Zhao, Jinyuan Yao, Guifu Ding, Xiaolin Zhao. “A MEMS Inertial Switch with Compact Constraint Structures for Lowering Off-Axis Sensitivity”, IEEE SENSORS 2016. Orlando, USA. OCT 30-NOV 03, 2016. (Oral)
  31. Zhuoqing Yang, Shuwei liu, Fei Xue, Xiaolin Zhao, Jianmin Miao, L. K. Norford. “Micro anemometer by a MEMS compatible lab-on-a-tube technology”, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015). Anchorage, Alaska, USA. pp. 383-386. (Oral)
  32. Zhuoqing Yang, Qihuan Zhang, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda, Jinyuan Yao, Guifu Ding. “Fabrication of Microcoil with Large Tilt-Angle on Polymer Tube for Electromagnetically-Driven Scanner in Single Fiber Endoscope”, IEEE SENSORS 2015. Busan, Korea. pp. 1-4.
  33. Shuwei Liu, Zhuoqing Yang, Yi Zhang, Fei Xue, Shanshan Pan, Jianmin Miao, Leslie K. Norford, “Micro triple-hot-wire anemometer on small sized glass tube fabricated in 5DOF UV lithography system”, IEEE Int. Conf. on Micro Electro Mechanical Systems (IEEE MEMS 2015). Estoril, Portugal. pp. 714-717.
  34. Zhuoqing Yang, Wenguo Chen, Guifu Ding, Yan Wang, Hong Wang, Xiaolin Zhao. “Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor”, IEEE Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on, Cannes, France, pp. 1-5. (Oral)

代表性科研项目（主持）

  1. 国家重点研发计划课题（2020YFB2008503）：2020-2023；
  2. 国家自然科学基金面上项目（61571287）： 2016-2019；
  3. 国家自然科学基金面上项目（61974088）： 2020-2023；
  4. 国家“863”计划子课题（2015AA042701）；2015-2018；
  5. 国家自然科学青年基金（51205254）： 2013-2015；
  6. 上海市“浦江人才计划”（14PJ1405800）：2014-2016；

获奖情况

  1. 上海市“技术发明一等奖”；
  2. 中国机械工程学会年度优秀论文奖；
  3. 上海市国际合作基金“应用材料”（AM）奖学金；
  4. 上海交通大学“伍威权研究生奖学金”；
  5. 上海交通大学微纳科学技术研究院博士生优秀论文奖；

《集成电路制造技术》 （48学时），工程硕士，秋季学期

《集成电路高等制造工艺》 （48学时），全日制硕士，秋季学期

《集成电路与微系统封装技术》 （32学时），本科生，春季学期

微纳电子学系