杨卓青

杨卓青 / 研究员、博导


电子邮箱:yzhuoqing@sjtu.edu.cn
办公电话:021-34206687
办公地点:综合实验楼2-310

 

2018.12~至今,上海交通大学,电子信息与电气工程学院,研究员

2013.12~2018.11,上海交通大学,电子信息与电气工程学院,副研究员

2011.11~2013.11,日本国立产业技术综合研究所(AIST),JSPS博士后特别研究员(JSPS Postdoctoral Fellow)

2010.06~2013.11,上海交通大学,微纳科学技术研究院,助理研究员

2006.04~2010.03,上海交通大学,微纳科学技术研究院,博士

2003.07~2005.09,哈尔滨工程大学,机电工程学院,硕士

1999.09 ~2003.07,哈尔滨工程大学,机电工程学院,本科

 

1982年4月生,2003年本科毕业于哈尔滨工程大学机电工程学院,并被保送继续攻读硕士学位,获得材料物理与化学专业硕士学位,2006年入上海交通大学微电子学与固体电子学专业攻读博士学位,2010年3月毕业获得工学博士学位,并留校任教继续从事相关科研工作。目前研究工作主要包括MEMS惯性开关器件、PowerMEMS、封装以及微纳柔性3D集成传感技术。先后主持承担国家自然科学青年基金、面上项目,国家“863”项目子课题,总装瓶颈项目子课题,教育部装备预研联合基金,上海市“浦江人才计划”项目,以及国家级重点实验室开放基金等项目。

2011-2013年期间,受日本学术振兴会(JSPS)资助赴日本国立产业技术综合研究所(AIST)从事博士后(JSPS Postdoctoral Fellow)工作,研究期间利用3D立体曝光技术,成功开发了在微细石英圆管、毛细管、以及柔性纤维表面制作高精度、高分辨率的多层多功能微型传感器技术和柔性单光纤医用内窥镜,同时,结合该研究中心在纳米压印技术上的国际领先优势,完成了能够充分提高信号灵敏度的集成纳米压印的微型MEMS柔性血糖传感器开发,为柔性电子纤维编织提供了重要的技术支撑,申请日本发明专利1项。

近年来,在微纳机电系统技术领域著名期刊和国际会议IEEE-JMEMS, JMM,Lab Chip, IEEE Trans. Electron Devices, Sensors and Actuators, IEEE MEMS, TRANSDUCERS, IEEE SENSORS, μTAS等发表学术论文100多篇,并多次做大会口头报告和邀请报告,申请中国发明专利30余项,担任多个SCI期刊审稿人。2010年参与组织首届上海交通大学—瑞典ICA(Ingvar Carlsson Award)双边学术研讨会,并作为纳米信息材料分会主席,此外,还担任IEEE INEC2018、IMCO 2018和IEEE NEMS2019等多个国际会议分会场主席,目前为International Journal of Sensors and Sensor Networks (IJSSN)和The Open Materials Science Journal期刊编委。

2009年度获得中国机械工程学会优秀论文奖,目前为IEEE会员、中国微米纳米技术学会(CSMNT)高级会员,2014年入选上海市“浦江人才计划”(A类),2016年获得上海市“技术发明一等奖”(排名6)。

 

招收学生的范围:

材料、机械、物理、化学、半导体、电子信息和生物医学等专业。

 

研究方向

  1. 微机电系统(MEMS):微纳传感器与执行器
  2. MEMS惯性开关器件、物联网近零功耗振动传感器及其相关应用
  3. 微纳多元兼容集成制造技术(MECMPs)
  4. 微纳柔性传感技术(柔性纤维编织、柔性电子皮肤等)

 

主要论文:

专著章节:

  1. Zhuoqing Yang, and Yi Zhang, Lab-on-a-tube Surface Micromachining Technology, Chapter 5 of Thin Film Processes – Artifacts on Surface Phenomena and Technological Facets, Ed. Jagannathan Thirumalai, InTech Press, pp. 91-105, Print ISBN 978-953-51-3067-3.
  2. Zhuoqing Yang, Guifu Ding, Yan Wang and Xiaolin Zhao, A MEMS Inertial Switch Based on Non-silicon Surface Micromachining Technology, Chapter of Micro Electro Mechanical Systems, Ed. Qing-An Huang, Springer Nature Singapore Pte Ltd. Press, pp. 1-55, ISBN: 978-981-10-5946-9.

代表论文

  1. Zhuoqing Yang*, Jianhao Shi, Jinyuan Yao, Xiaojing Zhang, Guifu Ding and Xiaolin Zhao. “A Laterally Driven MEMS Inertial Switch With Double-Layer Suspended Springs for Improving Single-Axis Sensitivity”, IEEE Trans. Compon., Packag., Manuf. Technol., vol. 8, no. 10, pp. 1845-1854, 2018.
  2. Zhuoqing Yang*, Jianhao Shi, Bin Sun, Jinyuan Yao, Guifu Ding, Renshi Sawada, “Fabrication of electromagnetically-driven tilted microcoil on polyimide capillary surface for potential single-fiber endoscope scanner application,” Micromachines, vol. 9, DOI: 10.3390/mi9020061, 2018.
  3. Qiu Xu, Bin Sun, Yigui Li, Xiaojian Xiang, Liyan Lai, Jian Li, Guifu Ding, Xiaolin Zhao, Zhuoqing Yang*, “Design and characterization of an inertial microswitch with synchronous follow-up flexible compliant electrodes capable of extending contact duration,” Sensors and Actuators A: Physical, vol. 270, pp.34-45, 2018.
  4. Qiu Xu, Zhuoqing Yang*, Yunnan Sun, Liyan Lai, Zhiyu Jin, Guifu Ding, Xiaolin Zhao, Jing Wang. “Shock-resistibility of MEMS-based inertial microswitch under reverse directional ultra-high g acceleration for IoT applications”, Scientific Reports, vol.7, 45512, 2017.
  5. Qiu Xu, Zhuoqing Yang*, Bo Fu, Jianhua Li, Hao Wu, Qihuan Zhang, Yunna Sun, Guifu Ding, Xiaolin Zhao. “A surface-micromachining-based inertial micro-switch with compliant cantilever beam as movable electrode for enduring high shock and prolonging contact time”, Applied Surface Sciences, vol. 387, pp. 569-580, 2016.
  6. Qihuan Zhang, Zhuoqing Yang*, Qiu Xu, Yang Wang, Guifu Ding, Xiaolin Zhao. “Design and fabrication of a laterally-driven inertial micro-switch with multi-directional constraint structures for lowering off-axis sensitivity”, Journal of Micromechanics and Microengineering, vol. 26, 055008(15pp), 2016.
  7. Qiu Xu, Zhuoqing Yang*, Qihuan Zhang, Yunnan Sun, Yang Wang, Hong Wang, Guifu Ding, Xiaolin Zhao. “Simulation and characterization of a thin film Au/Ni micro hot bridge-wire ignition element under capacitor discharging”, International Journal of Thermal Sciences, vol. 102, pp. 100-110, 2016.
  8. Wenguo Chen, Zhuoqing Yang*, Yan Wang, Guifu Ding, Hong Wang, Xiaolin Zhao. “Fabrication and characterization of a low-g inertial microswitch with flexible contact point and limit-block constraints”, IEEE/ASME Transactions on Mechatronics, vol. 21, pp. 963-972, 2016.
  9. Yang Wang, Zhuoqing Yang*, Qiu Xu, Wenguo Chen, Guifu Ding, Xiaolin Zhao. “Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between electrodes for prolonging contact time”, Journal of Micromechanics and Microengineering, vol. 25, 085012(8pp), 2015.
  10. Zhuoqing Yang*, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “A novel MEMS compatible lab-on-a-tube technology”, Lab on a Chip, vol. 14, pp. 4604-4608, 2014.
  11. Zhuoqing Yang*, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda. “Flexible implantable microtemperature sensor fabricated on polymer capillary by programmable UV lithography with multilayer alignment for biomedical applications”, IEEE/ASME Journal of Microelectromechanical Systems, vol. 23, No. 1, pp. 21-29, July, 2014.
  12. Zhuoqing Yang*, Bin Zhu, Wenguo Chen, etc. “Fabrication and characterization of a multidirectional-sensitive contact-enhanced inertial microswitch with an electrophoretic flexible composite fixed electrode”, Journal of Micromechanics and Microengineering, vol. 22, 045006(10pp), 2012.
  13. Zhuoqing Yang*, Guifu Ding, Haogang Cai, etc. “A MEMS inertia switch with bridge-type elastic fixed electrode for long duration contact”, IEEE Transactions on Electron Devices, vol. 55, pp. 2492-2497, 2008.
  14. Haogang Cai, Zhuoqing Yang*, etc. “Development of a novel MEMS inertial switch with compliant stationary electrode”, IEEE Sensors Journal, vol. 9, pp. 801-808, 2009.
  15. Jianhao Shi, Hongfang Li, Bin Sun, Xiaolin Zhao, Guifu Ding and Zhuoqing Yang. “A Flexible Pressure Sensor Based on Low-Cost Electroplated-Ni Film Induced Cracking for Wearable Devices Application,” IEEE NEMS 2018, Apr. 22-26, Singapore. (Oral)
  16. Zhuoqing Yang, Jianhao Shi, Bin Sun, Congchun Zhang, Guifu Ding, and Xiaolin Zhao. “Non-Silicon Micro/Nano 3D Integrated Manufacturing Technology for Near-Zero-Power and Flexible MEMS Devices Applications,” 8th IEEE International Nanoelectronics Conference (IEEE INEC), Jan 03-05, 2018, Kuala Lumpur, Malaysia. (Invited Talk)
  17. Mengyuan Zhao, Zhuoqing Yang, Bin Sun, Bo Dai, Hua Liu, Jinyuan Yao, Xiaoxue Xu, Guifu Ding, Xiaolin Zhao. “A micro electromagnetically-driven scanner by 2-DOF second-order resonance to extend scanning scale for ultra-thin single-fiber endoscope application,” IEEE MEMS 2018, pp. 575-578, Belfast, UK.
  18. Zhuoqing Yang. “MEMS sensors and actuators based on 3D micro-fabrication technologies for wearable devices and IoT applications,” The 4th Int’l Conference on Semiconductor Physics and Devices (ICSPD 2017), Sep. 24-26, Suzhou, China (Keynote Speech)
  19. Qiu Xu, Zhuoqing Yang, Yunna Sun, Mengyuan Zhao, Jian Li, Guifu Ding, Xiaolin Zhao. “Shock-resistibility of inertial microswitch under reverse sensitive directional ultra-high G acceleration”, IEEE MEMS 2017, pp. 789-792, Las Vegas, NV, USA.
  20. Qiu Xu, Zhuoqing Yang, Yunnan Sun, Jiangbo Luo, Hongfang Li, Guifu Ding, Xiaolin Zhao, Jinyuan Yao, Jing Wang, “A novel inertial microswitch with synchronous follow-up compliant electrodes for extending output switch-on pulse width,” The 19th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2017). Kaohsiung, Taiwan, Jun. 18-22, pp. 2015-2018.
  21. Qihuan Zhang, Zhuoqing Yang, Qiu Xu, Mengyuan Zhao, Jinyuan Yao, Guifu Ding, Xiaolin Zhao. “A MEMS Inertial Switch with Compact Constraint Structures for Lowering Off-Axis Sensitivity”, IEEE SENSORS 2016. Orlando, USA. OCT 30-NOV 03, 2016. (Oral)
  22. Zhuoqing Yang, Shuwei liu, Fei Xue, Xiaolin Zhao, Jianmin Miao, L. K. Norford. “Micro anemometer by a MEMS compatible lab-on-a-tube technology”, The 18th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers 2015). Anchorage, Alaska, USA. pp. 383-386. (Oral)
  23. Zhuoqing Yang, Qihuan Zhang, Yi Zhang, Toshihiro Itoh, Ryutaro Maeda, Jinyuan Yao, Guifu Ding. “Fabrication of Microcoil with Large Tilt-Angle on Polymer Tube for Electromagnetically-Driven Scanner in Single Fiber Endoscope”, IEEE SENSORS 2015. Busan, Korea. pp. 1-4.
  24. Shuwei Liu, Zhuoqing Yang, Yi Zhang, Fei Xue, Shanshan Pan, Jianmin Miao, Leslie K. Norford, “Micro triple-hot-wire anemometer on small sized glass tube fabricated in 5DOF UV lithography system”, IEEE Int. Conf. on Micro Electro Mechanical Systems (IEEE MEMS 2015). Estoril, Portugal. pp. 714-717.
  25. Zhuoqing Yang, Wenguo Chen, Guifu Ding, Yan Wang, Hong Wang, Xiaolin Zhao. “Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor”, IEEE Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2014 Symposium on, Cannes, France, pp. 1-5. (Oral)

 

科研项目(主持)

  1. 国家自然科学青年基金(51205254): 2013-2015;
  2. 上海市“浦江人才计划”(14PJ1405800):2014-2016;
  3. 国家自然科学基金面上项目(61571287): 2016-2019;
  4. 重点实验室开放基金(9140C790302110C7906):2011-2013;
  5. 国家“863”计划子课题(2015AA042701);2015-2018
  6. 总装瓶颈项目子课题:2015-2018
  7. 教育部装备预研联合基金(6141A02033403):2017-2018
  8. 重庆大学“新型微纳器件与系统技术”重点实验室访问基金(2014MS02):2014-2016。

 

获奖情况

  1. 上海市“技术发明一等奖”(排名6);
  2. 中国机械工程学会年度优秀论文奖;
  3. 上海市国际合作基金“应用材料”(AM)奖学金;
  4. 上海交通大学“伍威权研究生奖学金”;
  5. 上海交通大学微纳科学技术研究院博士生优秀论文奖;

《集成电路制造技术》 (48学时),工程硕士,秋季学期

《集成电路高等制造工艺》 (48学时),全日制硕士,秋季学期

《集成电路与微系统封装技术》 (32学时),本科生,春季学期

微纳电子学系