张丛春

张丛春 / 副教授、博导


电子邮箱：zhcc@sjtu.edu.cn
办公电话：021-34206687
办公地点：综合实验楼2-310

 

 

        张丛春，副教授，博士生导师。1991年-1998年，武汉工业大学（现武汉理工大学），获得材料科学硕士学位。2002年毕业于华中科技大学电子科学与技术系，获微电子与固体电子学博士学位。2002年进入上海交通大学电子科学与技术博士后流动站， 2004年出站后留校工作，2005年晋升副教授。2007年获上海市优秀青年教师后备人选，2008年获上海交通大学晨星青年学者奖励计划一等奖，2011年至2012年国家公派赴美国哥伦比亚大学访问交流。

        主持承担国家重点研发计划，基础加强计划项目、国家“863”、国家自然科学基金、民机专项、十二五国家02重大专项、上海市纳米专项及国际合作研究项目等国家和省部级项目。科研成果获2016年度上海市技术发明奖一等奖。相关研究成果在国际著名期刊和会议上(IEEE MEMS, Transducers)发表学术论文70余篇，申请发明专利20多项。目前为Micro and Nanosystems、Advances in materials国际学术期刊编委。Sensors and Actuator A, Applied surface scicence、Vacuum, Materials letters, Surface and coatings technology、thin solid films、Acta Metal等期刊的审稿。

        招生微电子、电子科学与技术、物理、材料、半导体、仪器、机械、化学等专业硕士、博士研究生和博士后。

 

研究方向:

1. 电子薄膜与器件

2. 微纳加工技术

3. MEMS微传感器与驱动器（应用于高温、海洋等特殊环境等）

4. 柔性电子器件

代表性专著：

Congchun Zhang, and Jianze Huang, etc., Textured BST Thin Film on Silicon Substrate: Preparation and Its Applications for High Frequency Tunable Devices, Chapter 12 of Coatings and Thin Film Technologies, Ed. Jaime Andres Perez-Taborda and Alba G. Avila Bernal, InTech Press, pp. 241-258, Print ISBN 978-1-78984-870-0.

 

代表性论文:

  1. Jianze Huang, Yang Liu, Zhiyong Tang, Xiufeng Shao, and Congchun Zhang*, A Polymer-Based Microfluidic Sensor for Biochemical Detection, IEEE SENSORS JOURNAL, 2020(20)：6270-6276
  2. Shenyong Yang, Hongfang Li, Xingkai Lin, Jinyuan Yao, Zhouqing Yang, Congchun Zhang*,Hong Wang, Guifu Ding*, Effect of Al2O3/Al bilayer protective coatings on the high-temperature stability of PdCr thin film strain gages，Journal of Alloys and Compounds, (2018),759:1-7
  3. Yanlei Wang; Congchun Zhang*; Juan Li; Guifu Ding; Li Duan, Fabrication and characterization of ITO thin film resistance temperature detector, Vacuum, 2017, v140, p121-125
  4. Yanlei Wang, Congchun Zhang*, Di Niu, Guifu Ding, Li Duan, High temperature sensors fabricated on Al2O3 ceramic and nickel-based superalloy substrates, SENSORS AND ACTUATORS A,2016,247:75-82
  5. Xingkai Lin,Congchun Zhang*, Shenyong Yang, The impact of thermal annealing on the temperature dependent resistance behavior of Pt thin films sputtered on Si and Al2O3 substrates, Thin Solid Films，2019，685：372-378 DOI：1016/j.tsf.2019.06.036
  6. Shenyong Yang, Congchun Zhang*, Zhouqing Yang, Hong Wang, Guifu Ding, Effect of nitrogen doping temperature on the resistance stability of ITO thin films,2019,778:90-96 DOI：1016/j.jallcom.2018.11.126
  7. Shenyong Yang, Congchun Zhang*, Xinyue Chang, Jianze Huang, et al,Effect of heat treatment atmosphere on the piezoresistivity of indium tin oxide ceramic strain sensor, Available online 24 May 2019, https://doi.org/10.1016/j.ceramint.2019.05.256
  8. Niu, Di; Wang, Qiang; Zhang Congchun*; Cheng, Ping; Wang, Yanlei; Zhang, Jiubin; Ding, Guifu; Preparation, characterization and application of high-temperature Al2O3 insulating film, SURFACE & COATINGS TECHNOLOGY, v 271, p 318-324, APR 15, 2016
  9. Junchao Gao, Franklin Li Duan, Chang Yu, Wentao Meng, Lizuo Liu, Guifu Ding, Congchun Zhang, & Ying Wang.. Electrical insulation of ceramic thin film on metallic aero-engine blade for high temperature sensor applications. Ceramics International, (2016)42(16), 19269-19275.
  10. Jiubin Zhang, Ping Cheng, Congchun Zhang, Guifu Ding*, Li Duan, Jing Shao, Qiang Wang. MEMS-based platinum-platinum rhodium film temperature sensor on alumina substrate. Journal of Engineer, 2016, 9, 315-317
  11. Jie Han, Ping Cheng, Hong Wang, Congchun Zhang, Jiubin Zhang, Yan Wang, Li Duan, & Guifu Ding. (2014). MEMS-based Pt film temperature sensor on an alumina substrate. Materials Letters, 125, 224-226.
  12. Yibo Wu, Congchun Zhang, Hong Wang,Guifu Ding, Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison, Journal of Micromechanics and Microengineering, 2011,vol.21,no.4, 045007(14pp)
  13. Wang Hong, Tang Jun, Li Guangyang, Zhang Congchun, A study on utilizing a chloride bath to electroform MEMS devices with high aspect ratio structures, Journal of Micromechanics and Microengineering, 2011, pp 1-9,
  14. B. Wu, C.C. Zhang＊, G.F. Ding, Fabrication of Low-Stress Low-Stiffness Leveraged Cantilever Beam for Bistable Mechanism, Microelectronic Engineering, 87 (2010) 2035–2041
  15. Yibo Wu, Juang Wang,Chunping Congchun Zhang,Hong Wang, Guifu Ding, Modeling, microfabrication and experiments of a free–free cantilever bistable micro mechanism supported with a diamond configuration, Microsyst. Technol. 2010，16：1869
  16. Yibo Wu,Guifu Ding, Congchun Zhang,Juang Wang, Shengping Mao, Hong Wang, Magnetostatic bistable MEMS switch with electrothermal actuators, Electronic Letters, 2010，46（15）
  17. Yibo Wu, Congchun Zhang, Hong Wang,Guifu Ding, Torsion/cantilever-based MEMS bistable mechanisms with different support configurations: structure design and comparison, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2011, vol.21(4):1-14
  18. Zhang Congchun, Yue Heng, Wang Hong, Ding Guifu, Zhao XiaoLin, Nanoporous copper films with high surface area formed by chemical dealloying from electroplated CuZn alloy, Micro and Nanosystems,Vol.8,no.1, 13-18,2016
  19. Guotai Congchun Zhang,Guifu Ding, Design and simulation of a novel check valve made by SU-8, Advanced Mechanical Design, 479-481 (2012) pp 2271-2274
  20. Yibo Wu, Juang Wang,Chunping Congchun Zhang,Hong Wang, Guifu Ding, Modeling, microfabrication and experiments of a free–free cantilever bistable micro mechanism supported with a diamond configuration, Microsyst. Technol. 2010，16：1869
  21. Yibo Wu,Guifu Ding, Congchun Zhang,Juang Wang, Shengping Mao, Hong Wang, Magnetostatic bistable MEMS switch with electrothermal actuators, Electronic Letters, 2010，46（15）
  22. B. Wu, C.C. Zhang＊, G.F. Ding, Fabrication of Low-Stress Low-Stiffness Leveraged Cantilever Beam for Bistable Mechanism, Microelectronic Engineering, 87 (2010) 2035–2041
  23. Yibo Wu, Guifu Ding, C. Zhang＊. Design and implementation of a bistable microcantilever actuator for magnetostatic latching relay. Microelectronics J，2010，vol 4，pp：325-330
  24. C. Zhang＊, J.C. Shi, C.S. Yang, G.F. Ding, Preparation of （100）-oriented LaNiO3 on Si for the textured Ba0.5Sr0.5TiO3 Thin Films, Applied Surface Science, 2008, 255: 2773-2776
  25. C. Zhang＊, Jie Hou, Rui Rao, C.S. Yang, Effects of process parameters on the LaNiO3 thin films deposited by radio-frequency magnetron sputtering, Thin Solid Films, 2009
  26. C. Zhang＊, C.S. Yang, G.F. Ding, Effects of aging on the Characteristics of TiNiPd shape memory alloy thin films, Materials Characterization, 2008, 59 (7): 957-960

 

Conference Presentations in English:

  1. Jianze Huang, Congchun Zhang, Guifu Ding et.al, A HIGH-SENSITIVITY MICROFLUIDIC CHIP CALORIMETER FOR BIOCHEMICAL REACTION MONITORING APPLICATIONS, IEEE Transducer 2019, Euro Sensors XXXIII, June 22-27, Berlin, Germany
  2. Shenyong Yang, Congchun Zhang, Guifu Ding, IN-SITU SELF-COMPENSATED PT-ITO THIN FILM STRAIN GAGE WITH A NANO LAMINATED STRUCTURE, IEEE Transducer 2019, Euro Sensors XXXIII, June 22-27, Berlin, Germany
  3. Shenyong Yang; Congchun Zhang*; Hong Wang; Guifu Ding, An in-situ prepared synchronous self-compensated film strain gage for high temperature, 2017 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
  4. Yanlei Wang, Congchun Zhang, Guifu Ding, Fabrication and characterization of ITO thin film resistance temperature detector, 2016 IEEE International Nanoelectronics Conference (INEC), Oct.,2016,Chengdu,Sihuan,China
  5. B. Wu, C.C. Zhang＊, G.F. Ding, VERTICALLY BIDIRECTIONAL BISTABLE MICRORELAY WITH MAGNETOSTATIC AND THERMAL ACTUATIONS, the 23rd IEEE International Conference on Micro-Electro-Mechanical Systems(MEMS 2010) in Hong Kong S.A.R., China.
  6. Yibo Wu, Guifu Ding, Hong Wang, Cong Chun Zhang，EFFICIENT SOLUTION TO SELECTIVE WET ETCHING OF ULTRA-THICK COPPER SACRIFICIAL LAYER WITH HIGH SELECTIVE ETCHING RATIO, Proceeding of 16th International Solid-State Sensors, Actuators and Microsystems Conference, 2011,TRANSDUCERS’11, June5-9，2011,Beijing,China, pp.1388-1391
  7. B. Zhang, C.C. Zhang, G.F. Ding, An Electro-thermal SU-8 Cantilever Micro Actuator based on Bimorph Effect, the 5th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2010).
  8. Juan Wang, Yi bo Wu, and C. Zhang＊et al., “Design optimization of Polymeric Out-of-plane Electro-thermal Actuator ”, In Proc. 5th IEEE Int. Conf. Nano/Micro Eng. Molecular Syst., Xiamen,China, Jan., 2010.

 

本科生课程：先进微纳加工技术（双语）

研究生课程：微纳加工及器件：原理及应用（双语）

微纳电子学系