Cheng Xiulan

Dr. Xiulan Cheng received the B.S. Degree and M.S. Degree in Materials Science and Technology from Chongqing University in 1993 and in 1996 respectively, and the Ph.D. Degree in Microelectronics and Solid State Electronics from Shanghai Jiao Tong University in July, 2002.

 

From 1996 to 1999, she worked in Qishuyan Locomotive and Rolling Stock Institute of Railway Ministry as an engineer, and was responsible for the development of a ministry project (“Expert System of Heat Treatment of Key Parts in Locomotives and Rolling stocks” ) as the project leader. During 1999-2002, as a Ph.D. Candidate, her dissertation topic was focused on microfluidic MEMS, including preparation and characterization of shape memory alloy thin film, as well as the preparation, assembly and test of key devices such as microvalve and micropump. After that she joined Shanghai Belling Ltd. Co. (a 4~5 inch foundry) as a CMOS process engineer in Mar.,2002. Then moved to Semiconductor Manufacturing International Company (SMIC) in Oct.,2002 as a process development engineer in its Logic Technology

 

Development Center, and was responsible for the development of FEOL (Front of Line) CMP (Chemical Mechanical Planarization) process of 0.13um/90nm logic technologies.

 

In November of 2003, she joined the School of Microelectronics of Shanghai Jiao Tong University as an associate professor. Her previous research interests are mainly focused on devices and process of none-volatile memory (e.g., SONOS flash memory, metal nanocrystal memory), advanced technology of packaging and assmebly , and sensors based on carbon nanotube network films, etc. Recently, she gradually turned her research interests to the application of microelectronic technology in other fields, especially in Biotechnology and Medical technology applications. Now she has been doing research work on nanopore sequencing in University of Arkansas as a visiting professor since 2009.

 

In Shanghai Jiao Tong University, she ever taught some undergraduate and graduates course on semiconductor devices and Technology, such as Semiconductor Physics and Devices, VLSI Fabrication Technology, Microelectronic Packaging and Testing, Characterization on Semiconductor Materials and Devices, and Introduction to Microelectronics, etc.

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