Semiconductor Fabrication Teaching Laboratory

Basic Purposes:

To let the students get familiar with and understand the basic semiconductor fabrication technology more directly by providing IC fabrication platform that almost covers the whole process flow and lab teaching related to semiconductor fabrication courses.

To support the related teaching and labs that faces to the whole university, e.g. semiconductor physics and devices, analysis of semiconductor reliability and failure, characterization and measurement of semiconductor materials and device characteristics. To make it a public teaching and practice platform that can hold training programs, seminars and competitions, both in SJTU and with other universities.

The main facilities and equipments in this lab include lithography system, oxidation & diffusion furnace system, spin coater, hot plate, ellipsometer, etc.